LOAD PORT AND EFEM
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United States of America Patent
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N/A
Issued Date -
Sep 25, 2014
app pub date -
Nov 8, 2012
filing date -
Nov 9, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There is provided a device capable of effectively increasing the number of wafers that is conveyed inside a wafer transport chamber and capable of improving the wafer conveyance processing capacity if an EFEM is used, without leading to a marked increase in installation area. A load port includes: a plurality of levels of loading tables are provided in the height direction; and wafers housed inside FOUP on top of each loading table is inserted into and removed from inside wafer transport chambers, in a state wherein each loading table is arranged at a wafer insertion/removal position on the front surface of the wafer transport chambers. The loading tables includes a transport mechanism that moves wafers forward and back in the front/rear direction, between a FOUP passing/receiving position at which the FOUP are handed over to a FOUP transport device and the wafer insertion/removal position.
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