OPTICAL DEFECT INSPECTION SYSTEM
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United States of America Patent
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Issued Date -
Sep 18, 2014
app pub date -
Mar 12, 2014
filing date -
Mar 15, 2013
priority date (Note) -
Abandoned
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Abstract
Disclosed herein is a system for determining information about one or more defects on or in a test object. The system includes a light source configured to illuminate a test object with spatially coherent light; a multi-element detector positioned to detect an interference pattern of light associated with one or more defects on or in the illuminated test object; and an electronic control module in communication with the multi-element detector and configured to process the interference pattern to determine information about the one or more defects on or in the test object.
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