Waveguide-based apparatus for exciting and sustaining a plasma
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jan 26, 2016
Grant Date -
Sep 18, 2014
app pub date -
Mar 15, 2013
filing date -
Mar 15, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus includes an electromagnetic waveguide; an iris structure providing an iris in the waveguide. The iris structure may define an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole. A plasma torch is disposed within the iris hole. An electric field in the waveguide changes direction from the first iris slot to the second iris slot. The plasma torch generates a plasma which is substantially symmetrical around a longitudinal axis of the plasma torch, such that the plasma may have a substantially toroidal shape. In some embodiments, a dielectric material is disposed in the iris hole, outside of the plasma torch. In some embodiments, the height of at least one of the iris slots is greater at the ends thereof than in the middle.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
AGILENT TECHNOLOGIES INC | 5301 STEVENS CREEK BOULEVARD SANTA CLARA CA 95051-7201 |
International Classification(s)

- 2013 Application Filing Year
- H05H Class
- 283 Applications Filed
- 256 Patents Issued To-Date
- 90.46 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Owen, Geraint | Palo Alto, US | 25 | 297 |
# of filed Patents : 25 Total Citations : 297 | |||
Vahidpour, Mehrnoosh | Santa Clara, US | 16 | 215 |
# of filed Patents : 16 Total Citations : 215 |
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Patent Citation Ranking
- 3 Citation Count
- H05H Class
- 13.77 % this patent is cited more than
- 9 Age
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 26, 2027 |
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