Waveguide-based apparatus for exciting and sustaining a plasma

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9247629
APP PUB NO 20140265850A1
SERIAL NO

13838474

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus includes an electromagnetic waveguide; an iris structure providing an iris in the waveguide. The iris structure may define an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole. A plasma torch is disposed within the iris hole. An electric field in the waveguide changes direction from the first iris slot to the second iris slot. The plasma torch generates a plasma which is substantially symmetrical around a longitudinal axis of the plasma torch, such that the plasma may have a substantially toroidal shape. In some embodiments, a dielectric material is disposed in the iris hole, outside of the plasma torch. In some embodiments, the height of at least one of the iris slots is greater at the ends thereof than in the middle.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INC5301 STEVENS CREEK BOULEVARD SANTA CLARA CA 95051-7201

International Classification(s)

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  • 2013 Application Filing Year
  • H05H Class
  • 283 Applications Filed
  • 256 Patents Issued To-Date
  • 90.46 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2013201420152016201720182019202020210255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Owen, Geraint Palo Alto, US 25 297
Vahidpour, Mehrnoosh Santa Clara, US 16 215

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Patent Citation Ranking

  • 3 Citation Count
  • H05H Class
  • 13.77 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges341632514323301 - 1011 - 2021 - 3031 - 4041 - 5061 - 7081 - 900102030405060708090100110120130140150160170180

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