COMPOSITE END EFFECTORS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140265394A1
SERIAL NO

14200547

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An end effector includes a base, a plurality of fingers extending from the base, and a plurality of pads disposed on each of said fingers to support a substrate. The fingers comprise a carbon fiber material and taper from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base. A method includes adhering a plurality of pads along a plurality of tapered fingers, and adhering proximal ends of the plurality of tapered fingers with corresponding recesses of a base. The assembled pads, tapered fingers and base are placed on a fixture such that top surfaces of the plurality of pads rest on a top surface of the fixture and the assembly is held in place on the fixture until the adhesive has cured at room temperature.

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Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Forderhase, Paul Austin, US 10 29
Pergande, Paul E Austin, US 25 457

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