APPARATUS AND METHOD FOR THE PRETREATMENT AND/OR FOR THE COATING OF AN ARTICLE IN A VACUUM CHAMBER WITH A HIPIMS POWER SOURCE
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United States of America Patent
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Issued Date -
Sep 18, 2014
app pub date -
Jul 16, 2012
filing date -
Jul 15, 2011
priority date (Note) -
Abandoned
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Abstract
An apparatus for the pretreatment and/or for the coating of an article in a vacuum chamber having at least one cathode arranged therein having at least one HIPIMS power source and also having a device which generates a tunnel-like magnetic field in front of the surface of the cathode, is characterized in that the device is designed in order to generate the tunnel-like magnetic field in front of a portion of the surface of the cathode and in that the device is displaceable relative to the cathode to allow the magnetic field to act in front of at least one further portion of the surface of the cathode. The device can consist of permanent magnets, which are displaced relative to the cathode, or of magnetic field generating coils, which can be movably arranged or stationary.
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