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Abstract

Described is a combinational array gas sensor. In one aspect is described as an apparatus for measuring a concentration of at least one gas in air comprising an integrated semiconductor sensor unit, the semiconductor sensor unit comprising a common substrate; a plurality of semiconductor sensors disposed over the common substrate, wherein each of the plurality of semiconductor sensors senses at least one of a plurality of different gases, wherein at least one of the plurality of sensors senses the at least one gas, and wherein each of the plurality of the semiconductor sensors include two electrodes and a plurality of semiconductor ridges disposed between the two electrodes, each of the plurality of semiconductor ridges being made of a same composition of semiconductor material, thereby allowing the air with the gas disposed therein to be proximate to each of the plurality of semiconductor ridges unless inhibited by an inhibitor material; and a circuit that uses a source current to pass a measurement current through at least some of the plurality of semiconductor sensors and cause outputting of at least one measurement signal from the plurality of semiconductor sensors.

First Claim