PLASMA GENERATOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

14348071

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An arrangement for generating plasma, the arrangement comprising a primary plasma source (1) arranged for generating plasma, a hollow guiding body (11) arranged for guiding at least a portion of the plasma generated by the primary plasma source to a secondary plasma source (25), and an outlet (14) for emitting at least a portion of the atomic radicals produced by the plasma from the arrangement.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

loading....
  • 2012 Application Filing Year
  • H01J Class
  • 2054 Applications Filed
  • 1685 Patents Issued To-Date
  • 82.04 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20122013201420152016201720182019202020210255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lodewijk, Chris Franciscus Jessica Delft, NL 7 14
Smits, Marc Pijnacker, NL 15 26

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 1 Citation Count
  • H01J Class
  • 10.83 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1609132178244181453251401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0501001502002503003504004505005506006507007508008509009501000

Forward Cite Landscape

Load Citation