PLASMA GENERATOR
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Sep 28, 2012
filing date -
Sep 28, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
An arrangement for generating plasma, the arrangement comprising a primary plasma source (1) arranged for generating plasma, a hollow guiding body (11) arranged for guiding at least a portion of the plasma generated by the primary plasma source to a secondary plasma source (25), and an outlet (14) for emitting at least a portion of the atomic radicals produced by the plasma from the arrangement.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ASML NETHERLANDS B V | P O BOX 324 VELDHOVEN 5500 AH |
International Classification(s)

- 2012 Application Filing Year
- H01J Class
- 2054 Applications Filed
- 1685 Patents Issued To-Date
- 82.04 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Lodewijk, Chris Franciscus Jessica | Delft, NL | 7 | 14 |
# of filed Patents : 7 Total Citations : 14 | |||
Smits, Marc | Pijnacker, NL | 15 | 26 |
# of filed Patents : 15 Total Citations : 26 |
Cited Art Landscape
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Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 10.83 % this patent is cited more than
- 11 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 11, 2026 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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