HETEROJUNCTION TRANSISTOR AND METHOD OF FABRICATING THE SAME

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United States of America Patent

APP PUB NO 20140252371A1
SERIAL NO

14199254

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Abstract

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Exemplary embodiments of the present invention disclose a heterojunction transistor having a normally off characteristic using a gate recess structure and a method of fabricating the same. The heterojunction transistor may include a substrate, a channel layer disposed on the substrate and made of a first nitride-based semiconductor having a first energy bandgap, a first barrier layer disposed on the channel layer and made of a second nitride-based semiconductor having a second energy bandgap different from the first energy bandgap, a gate electrode disposed in a gate control region of the first barrier layer, and a second barrier layer disposed in gate non-control regions of the first barrier layer and separated from the first barrier layer.

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Patent Owner(s)

Patent OwnerAddress
SEOUL SEMICONDUCTOR CO LTD97-11 SANDAN-RO 163BEON-GIL DANWON-GU ANSAN-SI GYEONGGI-DO 15429

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HAN, Yu Dae Ansan-si, KR 13 100
JONG, Young Do Ansan-si, KR 11 102
KWAK, June Sik Ansan-si, KR 6 25
LEE, Kwan Hyun Ansan-si, KR 6 28
TAKEYA, Motonobu Ansan-si, KR 98 1271

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