INJECTION SYSTEM FOR AN APPARATUS FOR DEPOSITING THIN LAYERS BY VACUUM EVAPORATION
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United States of America Patent
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Issued Date -
Sep 4, 2014
app pub date -
Oct 18, 2012
filing date -
Oct 21, 2011
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
An injection system for an apparatus for depositing thin layers by vacuum evaporation includes a container (4) for receiving a material to be evaporated, container heating elements adapted to evaporate the material, at least one injection ramp (1) including an inner conduit connected to the container so as to receive the evaporated material and a plurality of nozzles (3), each nozzle including at least a communication channel so as to diffuse the evaporated material into the vacuum evaporation chamber. The injection ramp (1) includes a plurality of injection modules (2a, 2b, 2c, 2d, 2e) mechanically connected to each other in series along a longitudinal direction (5), each injection module including a plurality of injection nozzles, and the injection ramp includes elements for adjusting the orientation of the injection modules about the longitudinal direction so as to align the injection nozzles along a line parallel to the longitudinal direction.
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Patent Citation Ranking
- 2 Citation Count
- C23C Class
- 11.69 % this patent is cited more than
- 11 Age