Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors

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United States of America Patent

APP PUB NO 20140242795A1
SERIAL NO

14191730

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Sterically hindered imidazolate ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY TEMPE AS 85284

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  • 2014 Application Filing Year
  • H01L Class
  • 23828 Applications Filed
  • 21803 Patents Issued To-Date
  • 91.51 % Issued To-Date
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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Moo-Sung Sungnam, KR 77 2452
Norman, John Anthony Thomas Encinitas, US 45 3304
Perez, Melanie K San Diego, US 7 46

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges7625916189582342423416712683684320001 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0500100015002000250030003500400045005000550060006500

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