COATING APPARATUS AND COATING METHOD

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United States of America Patent

APP PUB NO 20140242284A1
SERIAL NO

14188195

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Abstract

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A coating apparatus including a coating nozzle configured to apply a coating liquid to a substrate, and a gas supply part configured to supply a temperature control gas which controls an ejection direction of the coating liquid to the substrate.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTD150 NAKAMARUKO NAKAHARA-KU KANAGAWA KAWASAKI-SHI 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiba, Masaki Kawasaki-shi, JP 87 338
Hosoda, Hiroshi Kawasaki-shi, JP 22 198
Maruyama, Kenji Kawasaki-shi, JP 82 752
Sato, Akihiko Kawasaki-shi, JP 86 743
Shimai, Futoshi Kawasaki-shi, JP 31 218

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