Systems and methods for material processing using light-emitting diodes

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United States of America Patent

SERIAL NO

13781682

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Abstract

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Systems and methods for processing a material layer supported by a substrate using a light-source assembly that includes LED light sources each formed from an array of LEDs. The material layer is capable of undergoing a photo-process having a temperature-dependent reaction rate. Some of the LEDs emit light of a first wavelength that initiate the photo-process while some of the LEDs emit light of a second wavelength that heats the substrate. The heat from the substrate then heats the material layer, which increases the temperature-dependent reaction rate of the photo-process.

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Patent Owner(s)

Patent OwnerAddress
ULTRATECH INC3050 ZANKER ROAD SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hawryluk, Andrew M Los Atros, US 82 2909
Zafiropoulo, Arthur W Atherton, US 29 1521

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