TUBULAR TARGET AND METHOD OF PRODUCING A TUBULAR TARGET
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United States of America Patent
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app pub date -
Oct 17, 2012
filing date -
Oct 18, 2011
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Abstract
A tubular target is formed of refractory metal or a refractory metal alloy. The target has at least one tubular portion X with a relative density RDx and at least one tubular portion Y with a relative density RDy. At least one tubular portion X has, at least in some regions, a larger outer diameter than a tubular portion Y at least in some regions. A density ratio satisfies the relation (RDy−RDx)/RDy≧0.001. There is also described a method for producing a tubular target from refractory metal or refractory metal alloy by sintering and local deformation of different degree. The tubular target has a more uniform sputter removal over the entire surface area compared with prior tubular targets. The tubular targets do not exhibit any tendency to arcing or to particle regeneration.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
PLANSEE SE | METALLWERK-PLANSEE-STR 71 REUTTE A-6600 |
International Classification(s)

- 2012 Application Filing Year
- C23C Class
- 1946 Applications Filed
- 1591 Patents Issued To-Date
- 81.76 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Abenthung, Peter | Reutte, AT | 4 | 36 |
# of filed Patents : 4 Total Citations : 36 | |||
Dronhofer, Andre | Reutte, AT | 3 | 2 |
# of filed Patents : 3 Total Citations : 2 | |||
Koeck, Wolfgang | Reutte, AT | 1 | 1 |
# of filed Patents : 1 Total Citations : 1 | |||
Linke, Christian | Ehenbichl, AT | 19 | 22 |
# of filed Patents : 19 Total Citations : 22 | |||
Will, Tobias | Weinstadt-Beutelsbach, DE | 1 | 1 |
# of filed Patents : 1 Total Citations : 1 | |||
Wolf, Hartmut | Breitenwang, AT | 47 | 367 |
# of filed Patents : 47 Total Citations : 367 |
Cited Art Landscape
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Patent Citation Ranking
- 1 Citation Count
- C23C Class
- 11.69 % this patent is cited more than
- 11 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 28, 2026 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Legal Events
Date | Code | Event | Description |
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Jun 25, 2012 | FPAY | FEE PAYMENT | year of fee payment: 12 |
Jun 03, 2008 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Jan 16, 2004 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Oct 23, 2001 | CC | CERTIFICATE OF CORRECTION | |
Dec 26, 2000 | I | Issuance | |
Dec 07, 2000 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Mar 28, 1997 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SHIBATA, ATSUMI;TANO, MICHIYASU;REEL/FRAME:008593/0353 Owner name: DATA TEC CO., LTD., JAPAN Effective Date: Mar 28, 1997 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SHIBATA, ATSUMI;TANO, MICHIYASU;REEL/FRAME:008593/0353 Owner name: MURATA MFG. CO., LTD., JAPAN Effective Date: Mar 28, 1997 |
Feb 07, 1997 | F | Filing | |
Feb 09, 1996 | PD | Priority Date |

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