TUBULAR TARGET AND METHOD OF PRODUCING A TUBULAR TARGET
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Oct 17, 2012
filing date -
Oct 18, 2011
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A tubular target is formed of refractory metal or a refractory metal alloy. The target has at least one tubular portion X with a relative density RDx and at least one tubular portion Y with a relative density RDy. At least one tubular portion X has, at least in some regions, a larger outer diameter than a tubular portion Y at least in some regions. A density ratio satisfies the relation (RDy−RDx)/RDy≧0.001. There is also described a method for producing a tubular target from refractory metal or refractory metal alloy by sintering and local deformation of different degree. The tubular target has a more uniform sputter removal over the entire surface area compared with prior tubular targets. The tubular targets do not exhibit any tendency to arcing or to particle regeneration.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully