ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUBSTRATE COOLING
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United States of America Patent
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Issued Date -
Aug 28, 2014
app pub date -
Nov 11, 2013
filing date -
Feb 22, 2013
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Abstract
A first cooling mechanism is equipped with a heat exchange unit, in which heat exchange between a substrate and a cooling medium takes place, and flexible plastic tubing for channeling the cooling medium to the heat exchange unit; a second cooling mechanism for cooling the substrate by heat transfer; and a cooling mechanism control unit which, at least when the target substrate cooling temperature of the substrate is not higher than the critical cold resistance temperature of the plastic tubing, cools the substrate using the second cooling mechanism while channeling the cooling medium at a temperature higher than the critical cold resistance temperature through the plastic tubing. In addition, comprises temperature sensors are provided that measure the temperature of the substrate and a cooling mechanism control unit which, with controlling the temperature of the cooling medium in the first cooling mechanism, is configured to control the second cooling mechanism.
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