PHYSICAL/CHEMICAL SENSOR, PHYSICAL/CHEMICAL PHENOMENON SENSING DEVICE, AND METHOD FOR MANUFACTURING SAME

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United States of America Patent

APP PUB NO 20140233039A1
SERIAL NO

14348468

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Abstract

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Present invention relate to a physical/chemical sensor and a physical/chemical phenomenon sensing device that can detect minute change of surface stress and can be reduced in size and arrayed and to provide a method for manufacturing the same

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Patent Owner(s)

Patent OwnerAddress
NATIONAL UNIVERSITY CORPORATION TOYOHASHI UNIVERSITY OF TECHNOLOGY1-1 HIBARIGAOKA TEMPAKU-CHO TOYOHASHI-SHI AICHI-KEN 4418580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Oyama, Hiroki Toyohashi-shi, JP 88 589
Sawada, Kazuaki Toyohashi-shi, JP 40 864
Takahashi, Kazuhiro Toyohashi-shi, JP 419 3644

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