System and method for inspecting a sample using landing lens
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United States of America Patent
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Mar 29, 2016
Grant Date -
Aug 21, 2014
app pub date -
Feb 20, 2013
filing date -
Feb 20, 2013
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Abstract
An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
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