TOOL AND PROCESS FOR TREATING AN OBJECT BY PLASMA GENERATORS
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United States of America Patent
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Issued Date -
Aug 21, 2014
app pub date -
Jul 25, 2012
filing date -
Jul 29, 2011
priority date (Note) -
Abandoned
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Abstract
An apparatus for treating a surface of an object comprises a vacuum chamber in which the object is intended to be placed, and means, in communication with the vacuum chamber, for treating the surface of the object, comprising at least two plasma generator. The apparatus also comprises means for controlling each generator independently of any other generator. These controlling means comprise means for activating/deactivating the generator. The invention also relates to a process for treating a surface of an object.
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