METHOD FOR THE CONDITIONING OF FLAT OBJECTS

United States of America Patent

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Issued Date
Aug 14, 2014
app pub date
Jun 1, 2012
filing date
Aug 18, 2011

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Abandoned

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Abstract

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The invention relates to a method for the conditioning of flat objects such as silicon substrates.

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Patent Owner	Address
RENA GMBH	GERMAN GU TEN BACH

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Moecke, Jens	St. Antoni, CH	2	6

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METHOD FOR THE CONDITIONING OF FLAT OBJECTS

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United States of America Patent

14233102

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14233102

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