PIEZOELECTRIC SENSORS AND SENSOR ARRAYS FOR THE MEASUREMENT OF WAVE PARAMETERS IN A FLUID, AND METHOD OF MANUFACTURING THEREFOR
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United States of America Patent
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Aug 14, 2014
app pub date -
Aug 6, 2012
filing date -
Aug 8, 2011
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Abstract
The present disclosure relates to piezoelectric sensors and piezoelectric sensor arrays, to methods of manufacturing therefor, and to a method of measuring characteristics of a mechanical wave using a piezoelectric sensor array. A piezoelectric sensor is formed of a silicon substrate on which an electrical barrier is added. A patterned bottom electrode layer is added on top of the electrical barrier. A patterned bottom electrode layer is added on top of the electrical barrier. A piezoelectric layer and then a patterned top electrode layer are added on top of the electrical barrier.
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