GAS RELEASE DEVICE FOR COATING PROCESS
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United States of America Patent
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Issued Date -
Aug 7, 2014
app pub date -
Jan 28, 2014
filing date -
Feb 1, 2013
priority date (Note) -
Abandoned
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Abstract
A gas release device is formed of two plates combined together. Each of the plates includes an intake groove. Each of the intake grooves is linked with a first distribution groove. Each of the first distribution grooves is linked with two second distribution grooves. Each of the second distribution grooves is linked with two third distribution grooves. Each of the third distribution grooves is linked with two fourth distribution grooves. Each of the fourth distribution grooves is linked with two fifth distribution grooves. Each of the fifth distribution grooves has a venthole. After a gas of a vapor deposition source enters the intake groove, the gas passes through the first, second, third, fourth, and fifth distribution grooves in order and then substantially equal amount of the gas is finally released out of each of the ventholes.
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