INTEGRATED METAL OXIDE CHEMICAL SENSOR
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United States of America Patent
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Issued Date -
Jul 31, 2014
app pub date -
Jan 22, 2014
filing date -
Jan 31, 2013
priority date (Note) -
Abandoned
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Abstract
A chemical sensor is described with at least one layer of metal oxide arranged between two electrodes with the length of the layer of metal oxide between the electrodes being less than 50 microns, wherein at least one interface layer is formed between the surface of at least one of the electrodes and the layer of metal oxide and wherein the interface layer lowers the contact resistance between the electrodes and the layer of metal oxide by facilitating transport of charge carriers across layer boundaries.
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