Charged Particle Beam Instrument
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United States of America Patent
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Issued Date -
Jul 31, 2014
app pub date -
Jan 29, 2014
filing date -
Jan 29, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A charged particle beam instrument is offered which has a specimen pre-evacuation chamber. An outflow flow rate adjusting valve (70) adjusts the flow rate of gas exhausted from the specimen pre-evacuation chamber (20) under control of controller (82). The controller (82) for making a decision as to whether the difference between a first pressure in the pre-evacuation chamber (20) before the adjusting valve (70) is controlled to the first degree of opening and a second pressure in the pre-evacuation chamber (20) after the adjusting valve (70) has been controlled to the first degree of opening is greater than a first reference value.
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