METHODS FOR FABRICATING A THIN FILM TRANSISTOR AND AN ARRAY SUBSTRATE
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United States of America Patent
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Issued Date -
Jul 24, 2014
app pub date -
Dec 13, 2013
filing date -
Jan 21, 2013
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Abandoned
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Abstract
The present invention provides methods for fabricating a thin film transistor and an array substrate, which are applicable in the field of display device fabrication, and solve the problem of performing patterning process too many times during the fabrications of a thin film transistor and an array substrate. The method for fabricating a thin film transistor comprises: forming a gate layer on a substrate; forming a gate insulation layer on the substrate; forming an oxide semiconductor layer and a barrier layer and on the substrate; and forming a source-drain layer on the substrate, wherein, the step of forming the oxide semiconductor layer and the barrier layer comprises: sequentially forming an oxide semiconductor film a the barrier film; and forming the oxide semiconductor layer from the oxide semiconductor film and the barrier layer from the barrier film by performing a patterning process once.
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