CASCADED PLASMA REACTOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140205769A1
SERIAL NO

14155200

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments relate to a plasma reactor including two or more sub-plasma reactors connected in series to generate an increased amount or increase the reactivity of radicals and reactive species. The two sub-plasma reactors may be of the same type or a different type. The plasma reactor including two or more sub-plasma reactors connected in series is advantageous, among other reasons, because smaller space is used compared to having multiple plasma reactors placed on tandem.

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Patent Owner(s)

Patent OwnerAddress
VEECO ALD INC3191 LAURELVIEW COURT FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Sang In Sunnyvale, US 99 6600

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