GAS ANALYSIS DEVICE AND CONTAMINATION DETECTION METHOD USED IN SAME
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United States of America Patent
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Issued Date -
Jul 24, 2014
app pub date -
Sep 3, 2012
filing date -
Sep 8, 2011
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Abandoned
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Abstract
In order to make it possible to sensitively detect adsorptive gas even in the presence of a small amount of contamination that significantly influences adsorptive gas measurement, a gas injecting mechanism that injects adsorptive injection gas into a flow path through which sample gas is flowed, a gas measuring mechanism that can measure a value related to quantity of the adsorptive gas flowing through the flow path, and a contamination determining part that determines contamination in the flow path on the basis of a value related to a measurement response speed of the gas measuring mechanism to the adsorptive gas are provided.
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