Deposition substrate temperature and monitoring
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United States of America Patent
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Oct 11, 2016
Grant Date -
Jul 17, 2014
app pub date -
Mar 17, 2014
filing date -
Mar 24, 2011
priority date (Note) -
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Abstract
An apparatus for depositing a coating on one or more parts (21) has: a chamber (22); a part holder (64) for carrying the part(s); a bias voltage source (94) coupled to the part(s) to apply a bias voltage to the part(s); a source (34) of the coating material; a plurality of temperature sensors (76); and a plurality of leads (90) passing outputs of the temperature sensors out from the chamber. A temperature monitoring system (150) has a temperature data processor (300). At least one fiber optic link (223) couples the temperature data processor to the temperature sensors so as to electrically isolate the temperature data processor from the bias voltage.
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