High Sensitivity Micro-Piezoelectric Tunable Resonator
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United States of America Patent
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Issued Date -
Jul 17, 2014
app pub date -
Jan 17, 2013
filing date -
Jan 17, 2013
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Abandoned
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Abstract
A highly sensitive micro-piezoelectric tunable resonator element and device that uses a tapered transition region from the actuator and sensor elements to the resonator beam to permit maximum mechanical energy transfer to the beam. A dual-resonator beam embodiment with a shared tuning element is provided in an alternative embodiment.
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