TOPOGRAPHY SIMULATION APPARATUS, TOPOGRAPHY SIMULATION METHOD AND RECORDING MEDIUM
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United States of America Patent
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Issued Date -
Jul 10, 2014
app pub date -
Sep 6, 2013
filing date -
Jan 9, 2013
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Abstract
In one embodiment, a topography simulation apparatus includes a division module to divide a substance surface into plural computing elements, a determination module to extend straight lines in plural directions from each computing element, and to determine whether each straight line contacts the substance surface and determine which computing element each straight line contacts, and a calculation module to calculate, based on results of the determinations, a direct flux of a reactive species directly reaching each computing element, and a form factor indicating a positional relationship between the computing elements. When the determinations are performed to calculate the form factor in a case where an ionic species reaching each computing element is reflected, the determinations are performed by setting a cut-off angle for a reflection direction of the ionic species, and limiting the directions in which the straight lines are extended within a range of the cut-off angle.
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