METAL OBJECT WITH DIAMOND-LIKE CARBON FILM AND METHOD FOR FORMING DIAMOND-LIKE CARBON FILM
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United States of America Patent
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Jul 10, 2014
app pub date -
Jun 18, 2012
filing date -
Jul 21, 2011
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Abstract
A metallic film formation target which is an object on which a diamond-like carbon film is to be formed is placed in a flow channel through which film formation gas containing methane gas flows. The film formation gas is caused to flow at a predetermined flow rate through the flow channel during the process of raising the temperature of the film formation target from room temperature to a predetermined temperature. The film formation gas is thereby reacted with impurities in a film formation target surface for removal of the impurities from the film formation target surface and is further reacted with metallic elements exposed by the removal of impurities, thus forming a diamond-like carbon film on the film formation target surface.
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