Pressure-Sensitive Adhesive Sheet for Immobilization of Imprint Mold, Imprint Apparatus, and Imprint Method
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United States of America Patent
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Jul 10, 2014
app pub date -
Aug 27, 2012
filing date -
Aug 31, 2011
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Abstract
A pressure-sensitive adhesive sheet used for integrally immobilizing an imprint mold to a pressure application unit in an imprint apparatus for transferring a profile of a fine pattern formed on the imprint mold to a transfer-receiving body by pressing the imprint mold having the fine pattern thereon against the transfer-receiving body, having a substrate, a pressure-sensitive adhesive layer (A) provided on one surface of the substrate and a pressure-sensitive adhesive layer (B) provided on the other surface of the substrate. The adhesive strength of the pressure-sensitive adhesive layer (B) at 23° C. is higher than the adhesive strength of the pressure-sensitive adhesive layer (A) at 23° C., the pressure-sensitive adhesive layer (A) has an adhesive strength of 1 to 10 N/25 mm at 23° C. and an adhesive strength of 1 to 30 N/25 mm after allowed to stand for 7 hours at 80° C. and a humidity of 65%, and the pressure-sensitive adhesive layer (B) has an adhesive strength of 3 to 30 N/25 mm at 23° C.
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