LIMIT MEMBER HAVING PROTECTION COVER
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United States of America Patent
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N/A
Issued Date -
Jul 10, 2014
app pub date -
Feb 22, 2013
filing date -
Jan 10, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a limit member having a protection cover. The limit member is disposed in a substrate container and holds against the edge of at least one substrate received in the substrate container. The limit member has at least one limit portion and at least one protection cover. The protection cover is disposed on the limit portion. When the limit portion holds against the edge of the substrate, the substrate is against the protection cover on the limit portion, not being direct contact with the limit portion. This prevents the substrate from rubbing against the limit member to bring contamination particles, and further prevents the passivation layer of the substrate from being broken to pieces by the limit member to bring more contamination particles.
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