REMOVAL OF MASKING MATERIAL

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United States of America Patent

APP PUB NO 20140187460A1
SERIAL NO

13733540

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods for removing a masking material, for example, a photoresist, and electronic devices formed by removing a masking material are presented. For example, a method for removing a masking material includes contacting the masking material with a solution comprising cerium. The cerium may be comprised in a salt. The salt may be cerium ammonium nitrate.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Afzali-Ardakani, Ali Ossining, US 281 3364
Cooper, Emanuel Israel Scarsdale, US 10 114
Khojasteh, Mahmoud Poughkeepsie, US 40 284
Nunes, Ronald W Hopewell Junction, US 13 132
Totir, George Gabriel Newtown, US 4 55

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