Device and method for processing strip-type substrates

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United States of America Patent

APP PUB NO 20140186527A1
SERIAL NO

14091222

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates first to a device for processing a strip-type substrate (1), in particular by coating, in a processing chamber (2), using a processing roller (3) mounted to rotate about an axis of rotation (18) in the processing chamber (2), such that the substrate (1), which is unwound from a first coil (6) with which it is in contact in a helical pattern is processed continuously, wherein the processed, in particular coated, substrate (1) is wound onto a second coil (7), wherein a gas inlet/outlet device (8, 9, 10) is provided for generating a gas stream (11, 12) directed essentially in parallel to the axis of rotation (18). In addition, the invention relates to a method for coating a strip-type substrate (1) in a device.

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Patent Owner(s)

Patent OwnerAddress
AIXTRON SEDORNKAULSTRA¿E 2 HERZOGENRATH 52134

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rupesinghe, Nalin Cambridge, GB 7 23
Teo, Kenneth BK Cambridge, GB 9 5

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