CONDUCTANCE VALVE AND VACUUM PROCESSING APPARATUS
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United States of America Patent
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N/A
Issued Date -
Jul 3, 2014
app pub date -
Nov 14, 2013
filing date -
Dec 27, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A conductance valve is configured to be able to adjust the conductance by adjusting the opening degree of an opening formed in part of the wall surface a vacuum vessel. The conductance valve includes a swing arm which is pivotally coupled to a driving portion, and a rectangular valve body which is coupled to the swing arm and is pivotal with respect to it. When the swing arm pivots, the rectangular valve body is pivoted by a predetermined angle. The overhang of the valve body at the closed position of the conductance valve can be reduced.
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