SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
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United States of America Patent
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Issued Date -
Jun 26, 2014
app pub date -
Jan 4, 2013
filing date -
Dec 21, 2012
priority date (Note) -
Abandoned
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Abstract
A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.
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