Method of manufacturing mirror shells of a nested shells grazing incidence mirror
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United States of America Patent
Stats
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Aug 23, 2016
Grant Date -
Jun 26, 2014
app pub date -
Dec 16, 2013
filing date -
Dec 20, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a method of manufacturing mirror shells of a nested shells grazing incidence mirror, in particular for EUV radiation and/or X-rays. In the method a blank of a bulk material is provided and machined to form a mirror body of the shell. Mechanical structures are integrated and/or attached to the mirror body during and/or after the machining step. The mechanical structures are required for mounting and/or operating the mirror shells. After these steps the optical surface is formed on the mirror body by diamond turning. The proposed method allows the manufacturing of mirror shells of a nested shells grazing incidence mirror at low costs with high optical quality which may also be refurbished one or several times.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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USHIO DENKI KABUSHIKI KAISHA | TOKYO JAPAN TOKYO METROPOLIS |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Metzmacher, Christof | Raeren, BE | 22 | 358 |
# of filed Patents : 22 Total Citations : 358 | |||
Schuermann, Max Christian | Luebbecke, DE | 7 | 31 |
# of filed Patents : 7 Total Citations : 31 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 23, 2028 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Oct 04, 2016 | I | Issuance | |
Sep 14, 2016 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Nov 01, 2015 | FEPP | FEE PAYMENT PROCEDURE | free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Apr 04, 2013 | P | Published | |
Nov 19, 2012 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MEIERHANS, DANIEL;OSMANBASIC, FARUK;JUNIG, MARCUS;AND OTHERS;SIGNING DATES FROM 20120917 TO 20120921;REEL/FRAME:029320/0108 Owner name: INVENTIO AG, SWITZERLAND |
Sep 24, 2012 | F | Filing | |
Sep 30, 2011 | PD | Priority Date |

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