PLASMA GENERATION APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD
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United States of America Patent
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Issued Date -
Jun 12, 2014
app pub date -
Feb 27, 2013
filing date -
Apr 9, 2012
priority date (Note) -
Abandoned
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Abstract
There is provided a plasma generation apparatus capable of forming plasma suitable for a plasma assist method. The plasma generation apparatus includes a chamber 2, a plasma gun 3 arranged so as to face an inside of the chamber 2, and having a cathode 7 for emitting electrons and a convergent coil 11 for forming a magnetic flux to guide the electrons emitted by the cathode 7, and an auxiliary magnet 4 for forming a magnetic flux in the chamber 2, in which an excitation current is applied to the convergent coil 11 so as to vary a direction of the magnetic flux.
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