MEMS ELEMENT, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Jun 12, 2014
app pub date -
Dec 4, 2013
filing date -
Dec 11, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Non-US Coverage
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Abstract
A MEMS element includes a substrate and a plurality of resonators which are formed above a first surface of the substrate, the substrate includes at least one flexible portion and at least one non-flexible portion, and resonators corresponding to the flexible portion and the non-flexible portion are disposed.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SEIKO EPSON CORPORATION | 4-1 NISHI-SHINJUKU 2-CHOME SHINJUKU-KU TOKYO 163-0811 |
International Classification(s)

- 2013 Application Filing Year
- H02N Class
- 351 Applications Filed
- 294 Patents Issued To-Date
- 83.77 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chino, Yuji | Suwa, JP | 10 | 183 |
# of filed Patents : 10 Total Citations : 183 | |||
Matsuzawa, Yusuke | Chino, JP | 25 | 43 |
# of filed Patents : 25 Total Citations : 43 |
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Patent Citation Ranking
- 2 Citation Count
- H02N Class
- 3.77 % this patent is cited more than
- 11 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 12, 2025 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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