MEMS ELEMENT, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

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United States of America Patent

APP PUB NO 20140157892A1
SERIAL NO

14096412

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A MEMS element includes a substrate and a plurality of resonators which are formed above a first surface of the substrate, the substrate includes at least one flexible portion and at least one non-flexible portion, and resonators corresponding to the flexible portion and the non-flexible portion are disposed.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION4-1 NISHI-SHINJUKU 2-CHOME SHINJUKU-KU TOKYO 163-0811

International Classification(s)

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  • 2013 Application Filing Year
  • H02N Class
  • 351 Applications Filed
  • 294 Patents Issued To-Date
  • 83.77 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20132014201520162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chino, Yuji Suwa, JP 10 183
Matsuzawa, Yusuke Chino, JP 25 43

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Patent Citation Ranking

  • 2 Citation Count
  • H02N Class
  • 3.77 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges45229732611101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7081 - 9091 - 10002.557.51012.51517.52022.52527.53032.53537.54042.54547.55052.555

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