HEATER ASSEMBLY FOR DISK PROCESSING SYSTEM
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United States of America Patent
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Issued Date -
Jun 5, 2014
app pub date -
Nov 30, 2012
filing date -
Nov 30, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A heater assembly for a disk processing system including a heater element configured to heat a substrate carried by a holder, and a heater cover having an aperture to expose the heater element to the substrate. The cover may be metal to thermally couple the heater to a cooling plate. The cover may have an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder.
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