SOLAR CELL FORMATION APPARATUS AND METHOD
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United States of America Patent
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N/A
Issued Date -
May 15, 2014
app pub date -
Nov 9, 2012
filing date -
Nov 9, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially configured flow aperture. In another embodiment, an apparatus includes moveable shutters which open and close in synchronization with a rotating drum on which substrates are mounted for processing. In other embodiments, the apparatus includes a variable power supply or drum speed control which automatically vary the power supply to the apparatus or drum speed respectively in synchronization with the rotating drum.
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Cited Art Landscape
Patent Citation Ranking
- 4 Citation Count
- H01L Class
- 7.09 % this patent is cited more than
- 11 Age