SOLAR CELL FORMATION APPARATUS AND METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140131198A1
SERIAL NO

13672851

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially configured flow aperture. In another embodiment, an apparatus includes moveable shutters which open and close in synchronization with a rotating drum on which substrates are mounted for processing. In other embodiments, the apparatus includes a variable power supply or drum speed control which automatically vary the power supply to the apparatus or drum speed respectively in synchronization with the rotating drum.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TSMC SOLAR LTDNO 5 KEYA W ROAD DAYA DISTRICT TAICHUNG CITY 428-82

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHAO, Ying-Chen Hsinchu City, TW 26 766
TENG, Edward Sunnyvale, US 10 63
YANG, Chih-Jen Taichung City, TW 37 137

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation