TITANIUM-CONTAINING PRECURSORS FOR VAPOR DEPOSITION
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app pub date -
Jan 9, 2014
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Apr 7, 2010
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Disclosed are titanium-containing precursors and methods of synthesizing the same. The compounds may be used to deposit titanium, titanium oxide, strontium-titanium oxide, and barium strontium titanate containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.
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