METHOD AND APPARATUS FOR FABRICATING FREE-STANDING GROUP III NITRIDE CRYSTALS
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United States of America Patent
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Issued Date -
May 8, 2014
app pub date -
May 31, 2012
filing date -
May 31, 2011
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Abandoned
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Abstract
The method for fabricating a free-standing group III nitride plate (6) comprises the steps of: growing a first group III nitride layer (2) on a foreign growth substrate (1); treating the first group III nitride layer (2) so as to make it porous; growing at a growth temperature within a growth reactor (7) a second group III nitride layer (4) on the first group III nitride layer (2); and separating the second group III nitride layer (4) from the growth substrate (1) so as to form a free-standing group III nitride plate (6). According to the present invention, the step of separating the second group III nitride layer (4) from the growth substrate (6) is performed at the growth temperature and within a growth reactor (7), and comprises selective chemical etching of the porous first group III nitride layer (2).
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