RESIST COMPOSITION FOR NEGATIVE DEVELOPMENT WHICH IS USED FOR FORMATION OF GUIDE PATTERN, GUIDE PATTERN FORMATION METHOD, AND METHOD FOR FORMING PATTERN ON LAYER CONTAINING BLOCK COPOLYMER
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United States of America Patent
Stats
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N/A
Issued Date -
May 8, 2014
app pub date -
Oct 5, 2011
filing date -
Oct 7, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
A negative tone-development resist composition for forming a guide pattern, including a base component (A) and an acid generator component (B), the base component (A) including a resin component (A1) having a structural unit (a1) derived from an acrylate ester containing an acid dissociable group, and at least one of the following structural units (a2): a structural unit derived from an acrylic acid ester containing a lactone-containing cyclic group, a structural unit derived from an acrylic acid ester containing an ether-containing cyclic group and a structural unit derived from an acrylic acid ester containing a carbonate-containing cyclic group, and a constituent unit (a1) derived from an acrylic acid ester containing an acid-labile group, the acid generator component (B) including an acid generator (B1) including at least one compound represented by general formula (b1) or (b2) shown below
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TOKYO OHKA KOGYO CO LTD | KAWASAKI-SHI KANAGAWA 211 0012 | |
RIKEN | WAKO-SHI SAITAMA 351-0198 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Dazai, Takahiro | Kawasaki-shi, JP | 73 | 876 |
# of filed Patents : 73 Total Citations : 876 | |||
Fujikawa, Shigenori | Fukuoka-shi, JP | 22 | 172 |
# of filed Patents : 22 Total Citations : 172 | |||
Hayakawa, Harumi | Wako-shi, JP | 6 | 67 |
# of filed Patents : 6 Total Citations : 67 | |||
Koizumi, Mari | Wako-shi, JP | 6 | 107 |
# of filed Patents : 6 Total Citations : 107 | |||
Miyagi, Ken | Kawasaki-shi, JP | 69 | 670 |
# of filed Patents : 69 Total Citations : 670 | |||
Senzaki, Takahiro | Kawasaki-shi, JP | 48 | 183 |
# of filed Patents : 48 Total Citations : 183 |
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Patent Citation Ranking
- 23 Citation Count
- G03F Class
- 86.66 % this patent is cited more than
- 11 Age
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Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 8, 2025 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
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