METHOD OF MANUFACTURE AND APPARATUS THEREFOR
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United States of America Patent
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app pub date -
Jul 5, 2012
filing date -
Jul 6, 2011
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Abstract
A method of manufacturing at least one component in at least one component area on a substrate using a machine that has a substrate processing part relatively moveable with respect to the substrate. The method includes, at least when the substrate processing part and substrate are in a positional relationship in which the substrate processing part can process the at least one component area on said substrate, measuring the position of the substrate processing part relative to the substrate, by reading at least a first metro logical scale provided by the substrate.
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