Emission Curve Tracer Imaging
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United States of America Patent
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Issued Date -
May 1, 2014
app pub date -
Nov 27, 2012
filing date -
Nov 1, 2012
priority date (Note) -
Abandoned
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Abstract
An apparatus, a method, and a computer-program product for identifying a location of abnormal emission on integrated circuits are disclosed. The location of abnormal emission on integrated circuits is identified by measuring an emission intensity for each of a plurality of voltages for each pixel in an emission image of an integrated circuit; generating a plot of the measured emission intensities as a function of the plurality of voltages for each area in the emission image of the integrated circuit; determining differences in emission intensities of the generated plot for a selected area compared to a plot for a corresponding area known to have no abnormal emission; and identifying location of abnormal emission corresponding to the selected area the detected difference of which exceeds a pre-determined threshold.
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