EPHEMERAL BONDING

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United States of America Patent

APP PUB NO 20140117503A1
SERIAL NO

13661025

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Compositions suitable for temporarily bonding two surfaces, such as a wafer active side and a substrate, are disclosed. Methods of temporarily bonding two surfaces, such as the active side of a wafer and a substrate using the compositions disclosed herein are also provided.

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Patent Owner(s)

Patent OwnerAddress
ROHM AND HAAS ELECTRONIC MATERIALS LLCMASSACHUSETTS MASSACHUSETTS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
GALLAGHER, Michael K Hopkinton, US 91 1302
OLIVER, Mark S Boston, US 11 20

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