METHOD AND APPARATUS TO PRODUCE HIGH DENSITY OVERCOATS
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United States of America Patent
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Issued Date -
Apr 17, 2014
app pub date -
Oct 4, 2013
filing date -
Dec 17, 2010
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Abandoned
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Abstract
A deposition system is provided, where conductive targets of similar composition are situated opposing each other. The system is aligned parallel with a substrate, which is located outside the resulting plasma that is largely confined between the two cathodes. A “plasma cage” is formed wherein the carbon atoms collide with accelerating electrons and get highly ionized. The electrons are trapped inside the plasma cage, while the ionized carbon atoms are deposited on the surface of the substrate. Since the electrons are confined to the plasma cage, no substrate damage or heating occurs. Additionally, argon atoms, which are used to ignite and sustain the plasma and to sputter carbon atoms from the target, do not reach the substrate, so as to avoid damaging the substrate.
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