COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

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Apr 3, 2014
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Aug 26, 2013
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Sep 28, 2012

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Abstract

A gate electrode is formed above a compound semiconductor stacked structure, and the gate electrode includes a stack of a TaN:Al layer in which Al is solid-dissolved in TaN, a TaAlN layer made of a compound of TaN and Al, and an Al layer.

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TRANSPHORM JAPAN INC	SHIN-YOKOHAMA CENTER BLDG 9F 2-5-15 SHIN-YOKOHAMA KOHOKU-KU YOKOHAMA KANAGAWA 222-0033

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Inventor Name	Address	# of filed Patents	Total Citations
Kanamura, Masahito	Isehara, JP	33	1077
YOSHIKI, Jun	Aizuwakamatsu, JP	1	6

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COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

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United States of America Patent

13975713

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13975713

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