Method for avoiding artefacts during serial block face imaging
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United States of America Patent
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Jan 3, 2017
Grant Date -
Apr 3, 2014
app pub date -
Sep 9, 2013
filing date -
Sep 28, 2012
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Abstract
A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.
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