SEMICONDUCTOR DEVICE INCLUDING OPERATIVE CAPACITORS AND DUMMY CAPACITORS
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United States of America Patent
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app pub date -
Oct 4, 2013
filing date -
Jun 13, 2005
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Abandoned
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Abstract
The semiconductor device according to the present invention comprises a plurality of actually operative capacitors formed, arranged in an actually operative capacitor part over a semiconductor substrate and each including a lower electrode, a ferroelectric film and an upper electrode; a plurality of dummy capacitors formed, arranged in a dummy capacitor part provided outside of the actually operative capacitor part over the semiconductor substrate and each including the lower electrode, the ferroelectric film and the upper electrode; a plurality of interconnections respectively formed on said plurality of the actually operative capacitors and respectively connected to the upper electrodes of said plurality of the actually operative capacitors; and the interconnections respectively formed on said plurality of the dummy capacitors.
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